| 发明名称 |
Catoptric projection optical system |
| 摘要 |
A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of -0.14 or smaller.
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| 申请公布号 |
US2006087726(A1) |
申请公布日期 |
2006.04.27 |
| 申请号 |
US20050264043 |
申请日期 |
2005.11.02 |
| 申请人 |
SASAKI TAKAHIRO;SUNAGA TOSHIHIRO;HATAKEYAMA KOSHI |
发明人 |
SASAKI TAKAHIRO;SUNAGA TOSHIHIRO;HATAKEYAMA KOSHI |
| 分类号 |
G02B17/00;G21K1/06;G02B17/06;G02B17/08;G02B27/18;G03F7/20;G21K5/00;G21K5/02;H01L21/027 |
主分类号 |
G02B17/00 |
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