| 发明名称 |
Particle remover, exposure apparatus having the same, and device manufacturing method |
| 摘要 |
A particle remover includes an irradiation unit for irradiating plural lights onto a target from different directions, and for scanning the lights on the target, and a collector for collecting particles carried as a result of scanning of the lights.
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| 申请公布号 |
US2006086371(A1) |
申请公布日期 |
2006.04.27 |
| 申请号 |
US20050255530 |
申请日期 |
2005.10.20 |
| 申请人 |
OHKUBO AKINORI;YAMAZOE KENJI;OSAWA HIROSHI |
发明人 |
OHKUBO AKINORI;YAMAZOE KENJI;OSAWA HIROSHI |
| 分类号 |
B08B3/12;G03F1/24;G03F1/72;G03F7/20;H01L21/027 |
主分类号 |
B08B3/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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