| 摘要 |
PROBLEM TO BE SOLVED: To provide a tape adhering device capable of satisfactorily adhering a tape member to a work, performing heating and pressurizing processing, and enhancing adhesion strength; and to provide a tape adhering method. SOLUTION: The tape adhering device 10 for adhering the tape member 12 to the workpiece 11 comprises a placement means 35 for placing the work 11 on the upper surface thereof; a pressure chamber 50 capable of housing therein the placement means 35 and the workpiece 11 placed on the placement means 35, and of blocking the inside thereof in a hermetic state; a moving means 30 for moving the placement means 35 in the direction of the normal to the workpiece 11; a tape holding means 70 provided in the pressure chamber 50 for holding the tape member 12 at the upper part in the direction of the normal to the workpiece 11; an absorption means 84 for vacuum-absorbing the inside of the pressure chamber 50; a pressurization means 87 for introducing air into the pressure chamber 50 in a pressurization state; and a heating means 60 for heating the workpiece 11 placed on the placement means 35. COPYRIGHT: (C)2006,JPO&NCIPI |
