发明名称 Inspection method and inspection apparatus for semiconductor integrated circuit
摘要 In a semiconductor integrated circuit inspection method of inspecting a semiconductor integrated circuit comprising plural transistors according to which a test pattern generated for the semiconductor integrated circuit is input to an input terminal of the semiconductor integrated circuit, the time during which a voltage applied upon each of the transistors remains equal to or higher than a predetermined voltage is measured in response to inputting of the test pattern at the input terminal, and the ratio of thus measured time to the inspection time for the semiconductor integrated circuit is calculated.
申请公布号 US2006090147(A1) 申请公布日期 2006.04.27
申请号 US20050250377 申请日期 2005.10.17
申请人 SHARP KABUSHIKI KAISHA 发明人 NAKAJIMA YUKINORI
分类号 G06F17/50 主分类号 G06F17/50
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