| 发明名称 |
Porous material and production process thereof |
| 摘要 |
There are provided a porous material and a process for producing the same. The porous material has a plurality of columnar pores and an area surrounding the pores, and the area is an amorphous area containing C, Si, Ge or a combination thereof.
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| 申请公布号 |
US2006086691(A1) |
申请公布日期 |
2006.04.27 |
| 申请号 |
US20050264163 |
申请日期 |
2005.11.02 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
FKUTANI KAZUHIKO;DEN TOHRU |
| 分类号 |
C23F1/00;B31D3/00;B44C1/22;C23C14/06;C23C14/18;C23C14/58;C23C28/00;G11B5/855 |
主分类号 |
C23F1/00 |
| 代理机构 |
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代理人 |
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