发明名称 |
Enclosed container lid opening/closing system and enclosed container lid opening/closing method |
摘要 |
In order to easily and surely remove contaminants or the like from wafers stored in a pod (FOUP), a gas supply pipe is located above an opening portion in a FIMS system. A clean gas is blown to the upper surfaces of the wafers stored in the inner portion of the pod through the gas supply pipe to remove the contaminants or the like from wafers.
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申请公布号 |
US2006088406(A1) |
申请公布日期 |
2006.04.27 |
申请号 |
US20050257307 |
申请日期 |
2005.10.25 |
申请人 |
TDK CORPORATION |
发明人 |
MIYAJIMA TOSHIHIKO;SUZUKI HITOSHI;IGARASHI HIROSHI |
分类号 |
B65H1/00;B65B69/00;B65G1/00;H01L21/677 |
主分类号 |
B65H1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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