发明名称 CRYSTALLOGRAPHIC ALIGNMENT OF HIGH-DENSITY NANOWIRE ARRAYS
摘要 A method for controlling the crystallographic growth direction and geometric and physical characteristics of nanowires using a metal-organic chemical vapor deposition and substrate selection. As an illustration of the method, epitaxial growth of wurtzite gallium nitride on (100) y -LiAIO<SUB>2</SUB> and (111) MgO single crystal substrates resulted in the selective growth of nanowires in the orthogonal [110] and [001] directions, respectively. Triangular and hexagonal cross sections were observed as a result of substrate-induced constraints of lattice parameter matching and symmetry registry. These nanowire arrays exhibit a systematic difference in their temperature­ dependent band-edge emission resulting from the different size, shape, and anisotropic polarity of the nanostructures. Scaling of the synthetic process is entirely compatible with existing GaN thin-film technology and should enable the realization of a new generation of GaN nanowire devices and systems.
申请公布号 WO2005110057(A3) 申请公布日期 2006.04.27
申请号 WO2005US00568 申请日期 2005.01.06
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;YANG, PEIDONG;KUYKENDAL, TEVYE;PAUZAUSKIE, PETER 发明人 YANG, PEIDONG;KUYKENDAL, TEVYE;PAUZAUSKIE, PETER
分类号 H01L21/36;H01L21/20 主分类号 H01L21/36
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