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发明名称
Verfahren zur Herstellung von Monoschichten
摘要
申请公布号
DE60026293(D1)
申请公布日期
2006.04.27
申请号
DE20006026293
申请日期
2000.04.06
申请人
AUBURN UNIVERSITY, AUBURN
发明人
VODYANOY, VITALY JACOB;CHIN, BRYAN ALLEN;BARBAREE, JAMES MARTIN;NEELY, WILLIAM CHARLES;PATHIRANA, SURAM THERESE;HSIEN, YUN-HWA PEGGY;ZEE, RALPH HING-CHUNG;WIKLE HOWARD CLYDE III
分类号
H01L37/02;B05D1/20;B32B9/00;B32B9/04;C08F20/54;C08F20/58;C08F20/60;C12N11/02;C12N11/08;G01N33/543;G01N33/544;G01N33/545;G01N33/552;H01L41/18
主分类号
H01L37/02
代理机构
代理人
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