| 摘要 |
[PROBLEMS] A vaporizer for CVD, a solution vaporizing CVD system and a vaporization method for CVD in which continuous use time is prolonged by suppressing clogging of solution piping, or the like. [MEANS FOR SOLVING PROBLEMS] The vaporizer for CVD comprises a plurality of material solution pipe lines (1, 2) for supplying a plurality of material solutions separatedly, a carrier gas pipe line (3) arranged to surround the outside of the plurality of material solution pipe lines (1, 2) and feeding compressed carrier gas respectively to the outsides of the plurality of material solution pipe lines (1, 2), a pore provided at the forward end of the carrier gas pipe line (3) while being spaced apart from the forward end of the material solution pipe lines (1, 2), a vaporization tube (13) connected with the forward end of the carrier gas pipe line (3) and linked to the interior of the carrier gas pipe line (3) through the pore, a mechanism for cleaning at least one of the forward end of the carrier gas pipe line (3), the pore and the vaporization tube (13), and a heater for heating the vaporization tube (13).
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