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发明名称
PRODUCTION OF A STRUCTURE COMPRISING A PROTECTIVE LAYER AGAINST CHEMICAL TREATMENT
摘要
申请公布号
EP1649509(A2)
申请公布日期
2006.04.26
申请号
EP20040767815
申请日期
2004.07.29
申请人
S.O.I.TEC SILICON INSULATOR TECHNOLOGIES
发明人
GHYSELEN, BRUNO;RAYSSAC, OLIVIER
分类号
H01L21/20;H01L21/762;(IPC1-7):H01L21/762
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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