| 摘要 |
A mass flow controller (200) comprises: a mass flow sensor (202) configured to produce a mass flow signal representative of a gas flow through the mass flow controller (200); and an electronic controller (210) configured to produce a closed loop control signal for an outlet control valve(220), based on the mass flow signal. The electronic controller (210) comprises a dual processor controller configured to provide a network interface, for example a web server (602), that permits the execution of mass flow controller active diagnostics from a device connected to the network. The electronic controller (210) may comprise a dual processor arrangement consisting of a deterministic 1002 and a non-deterministic 1004 processor, where the deterministic 1004 processor is configured to produce the close loop signal for the outlet control valve (220). This arrangement may enable on-line monitoring and manipulation of mass flow controller signals. |
