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发明名称
Device for calculating the quantity of light and method thereof
摘要
申请公布号
EP1498935(B1)
申请公布日期
2006.04.26
申请号
EP20040254154
申请日期
2004.07.12
申请人
TOKYO SEIMITSU CO.,LTD.
发明人
KAWASHIMA, ISAMU
分类号
H01L21/00;G01J1/42;G01J1/48;H01L21/302;H01L21/68
主分类号
H01L21/00
代理机构
代理人
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地址
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