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发明名称
LOW DIELECTRIC CONSTANT MATERIALS PREPARED FROM PHOTON OR PLASMA ASSISTED CVD
摘要
申请公布号
KR100573708(B1)
申请公布日期
2006.04.26
申请号
KR20007004418
申请日期
2000.04.24
申请人
发明人
分类号
B32B9/04
主分类号
B32B9/04
代理机构
代理人
主权项
地址
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