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发明名称
Improvement of sioc properties and its uniformity in bulk for damascene applications
摘要
申请公布号
SG120990(A1)
申请公布日期
2006.04.26
申请号
SG20040003850
申请日期
2004.06.10
申请人
发明人
分类号
H01L21/316;H01L21/768;(IPC1-7):H01L21/26
主分类号
H01L21/316
代理机构
代理人
主权项
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