A method and a system for automatically controlling a current distribution of a multi-anode arrangement during the plating of a metal on a substrate surface

摘要

An electroplating tool (200) is operated in combination with a controller (250), which automatically determines the individual currents for a multi-anode configuration (102A, ..., 102N) of the plating tool. The calculation of the anode currents may be based on sensitivity data and measurement data as well as on a desired target profile, so that a fast response with respect to process variations may be achieved even for a plating tool including a plurality of process chambers (101A, 101B).