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发明名称
WAFER TRANSFER ROBOT FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
KR20060034163(A)
申请公布日期
2006.04.21
申请号
KR20040083318
申请日期
2004.10.18
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JUNG NAM
分类号
B65G49/07;B65G49/06
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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