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发明名称
摘要
申请公布号	KR100555454(B1)	申请公布日期	2006.04.21
申请号	KR19980045721	申请日期	1998.10.29
申请人		发明人
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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