COOLING AND LUBRICATION SYSTEM

摘要

Conventional dicing and singulation systems using conventional cooling and lubrication methods are now facing problems in obtaining quality cuts. Since a saw rotates at a very high speed, an air curtain or an air layer is formed around the rotating saw. This air curtain prevents cooling water from entering into the cutting zone to effectively cool and lubricate the saw. An embodiment of the invention describes use of ultrasonic waves for energizing fluid directed at the saw to enable the fluid to effectively penetrate the air curtain. This enables the fluid to contact the saw and consequently provide cooling thereof and lubrication thereto.