ACCELERATION/ANGULAR VELOCITY SENSOR UNIT

摘要

PROBLEM TO BE SOLVED: To improve substrate packaging density by solving the problem of reductions in substrate packaging density and improve sensor packaging precision by solving the problem of aggravations of sensor packaging precision.

SOLUTION: A forward and backward gravity sensor 51 and a roll rate sensor 54 are mounted to the backside 61b of a substrate 61 in parallel with an X-axis, and a lateral gravity sensor 52 and a pitch rate sensor 55 are mounted in parallel with a Y-axis. They are mounted in such a way that the forward and backward gravity sensor 51 and the lateral gravity sensor 52 may be very close to each other and that the roll rate sensor 54 and the pitch rate sensor 55 may be very close to each other. A vertical gravity sensor 53 and a yaw rate sensor 56 are mounted to the surface 61a of the substrate 61 perpendicularly to a Z-axis in such a way that the vertical gravity sensor 53 and the yaw rate sensor 56 may be very close to each other.

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