| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a triaxial acceleration sensor of which the resistance to shocks is improved by restricting the amount of displacement due to oscillations of a weight body, and provide its manufacturing method. <P>SOLUTION: The triaxial acceleration sensor 1 comprises a weight body 42; a weight body supporting part 16 supporting the weight body 42; frames 21 and 43 provided outside at prescribed intervals from the weight body 42 and the weight body supporting part 16, and a plurality of flexible beams 19a and 19b in such a way as to connect a silicon frame 21, a part of the frames, to the weight body supporting part 16. The triaxial acceleration sensor 1 is provided with restricting means 90 for restricting the amount of displacement of the weight body 42 by adjusting the size of gaps between the weight body 42 and the frame 43. The restricting means 90 are each constituted of both a contact part 84 provided for a part of a side surface of the weight body 42 at an opposite location from a gap and a part 85 to be in contact provided for a part of a side surface of the frames. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
