| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate placing stage wherein pins overlap on a cut scheduled line when supporting a large sized substrate where a plurality of substrates are subjected to multiple patterning. SOLUTION: A plurality of fixed pins 3 are mounted on a support plate. The fixed pins 3 are disposed at positions, as viewed in a flat plane, which overlap on an outer peripheral edge L1 located outside the effective area of the large-sized substrate placed on the substrate placing stage, and are also disposed at positions which overlap on a cut scheduled line L2 where the large-sized substrate is subjected to two-face patterning. In contrast, a movable pin 5 is inserted into a through hole formed in the support plate, and the movable pins 5 are disposed at positions which overlap on cut scheduled lines L3, L4 where the large-sized substrate is further subjected to patterning. The lateral movable pins 5 are mounted in common on a coupled plate located below the support plate, hereby elevates the lateral movable pins 5 simultaneously by driving a cylinder unit. COPYRIGHT: (C)2006,JPO&NCIPI |
