ELECTRODE FILM, PIEZOELECTRIC ELEMENT, FERROELECTRIC CAPACITOR AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrode film which obtains proper ferroelectrical characteristics, and to provide a piezoelectric element, a ferroelectric capacitor and a semiconductor device.

SOLUTION: The electrode film contains a platinum group metal formed above a substrate. A diffraction angle 2θ, corresponding to a peak obtained in an X-ray diffraction according to aθ-2θmethod using CuKαline is of a magnitude larger than that of the corresponding diffraction angle at the peak, after the heat treatment of the electrode film.

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