| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro plasma reaction device having a low-temperature micro plasma generating mechanism (a torch) capable of consistently generating micro plasma with low energy in a super-small space under normal temperature and normal pressure. SOLUTION: The micro plasma reaction device comprises a cylindrical plasma torch having a plasma torch inner pipe with a plasma gas introducing pipe connected thereto inside a plasma torch outer pipe with a sample gas introducing pipe connected thereto, a high frequency coil for exciting plasma gas provided on the outer circumference in a vicinity of an outlet of the plasma torch inner pipe, and a raw monomer gas feeding means. COPYRIGHT: (C)2006,JPO&NCIPI
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