发明名称 SPECIMEN SUPPORT AND ION-SPUTTERING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a specimen support which freely changes an angle of the surface of a specimen with a simple device. SOLUTION: The specimen support comprises: a table for holding the specimen thereon; a supporting device for rotatably supporting the table; a cam engaged with the table; and a rotary driving device for rotating the cam. The table is configured so as to rotate around a medial axis and simultaneously slant against a horizontal plane, when the cam rotates. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006104518(A) 申请公布日期 2006.04.20
申请号 JP20040292730 申请日期 2004.10.05
申请人 HITACHI SCI SYST LTD 发明人 ISHIDA KOJI;UKIANA MOTOHIDE;KUROSAWA KENJI
分类号 C23C14/50;C23C14/46 主分类号 C23C14/50
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