发明名称 |
Magnetic recording medium with diamond-like carbon protective film, and manufacturing method thereof |
摘要 |
Embodiments of the invention provide a magnetic recording medium superior in terms magnetic head flying performance, abrasion resistant reliability and corrosion resistance and a method for manufacturing the same. In one embodiment, method for manufacturing a magnetic recording medium, comprising forming at least an adhesion layer, a soft magnetic layer, a granular magnetic film and a diamond-like carbon (DLC) protective film on a nonmagnetic substrate. While the DLC protective film layer to protect the granular magnetic layer of the magnetic recording medium is formed, hydrocarbon gas is mixed with hydrogen gas and a bias voltage is applied to the substrate.
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申请公布号 |
US2006083952(A1) |
申请公布日期 |
2006.04.20 |
申请号 |
US20050254073 |
申请日期 |
2005.10.18 |
申请人 |
HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. |
发明人 |
ENDOU NAOTO;FUJIMAKI SHIGEHIKO;MATSUMOTO HIROYUKI;ONO TOSHINORI |
分类号 |
G11B5/65;C23C14/00;C23C14/32 |
主分类号 |
G11B5/65 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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