Method of transferring a substantially disc-shaped workpiece, and device for carrying out this method

摘要

A method is described for transferring a disc-shaped workpiece from a workpiece carrier, on which the workpiece is fastened along its first main surface by means of a first double-sided adhesive foil, onto a carrier foil, wherein the first double-sided adhesive foil is connected by a first adhesive layer to the workpiece carrier and by a second adhesive layer to the workpiece, with the following process steps: weakening the second adhesive layer through decomposition of its adhesive material down to a reduced adhesive force which is substantially smaller than the adhesive force of the first adhesive layer, fastening the workpiece carrier to a first retaining device, fastening the workpiece with its second main surface to a second retaining device by means of a second double-sided adhesive foil, such that the second double-sided adhesive foil is connected by a third adhesive layer to the second retaining device and by a fourth adhesive layer to the workpiece, and the adhesive forces of the third and the fourth adhesive layer are substantially greater than the adhesive force of the weakened second adhesive layer, separating the workpiece from the first double-sided adhesive foil along the weakened second adhesive layer through the application of a pulling force between the first and the second retaining device, positioning the workpiece with the second retaining device above the carrier foil, weakening the fourth adhesive layer through decomposition of the adhesive substance down to an adhesive force which is substantially smaller than the adhesive force of the third adhesive layer, placing the workpiece on the carrier foil, and separating the workpiece from the second double-sided adhesive foil along the weakened fourth adhesive layer by means of a gas pressure applied between the second double-sided adhesive foil and the workpiece. A device for carrying out this method is also described. A simple and inexpensive removal of a workpiece of the kind mentioned from a workpiece carrier is rendered possible thereby.