| 摘要 |
FIELD: gas analysis, in particular, engineering of detecting devices, used for registration and measurement of content of micro-admixtures of nitrogen and other gases. ^ SUBSTANCE: sensor has substrate and semiconductor base. Substrate is made of piezo-quartz resonator, and semiconductor base - of polycrystalline film of cadmium telluride, applied to electronic area of piezo-quartz generator. ^ EFFECT: increased sensitivity and manufacturability of sensor, expanded functional capabilities of the same. ^ 3 dwg |
