| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device capable of facilitating work such as mounting and demounting of a temperature adjusting pipe for an electrode and preventing an abnormal discharge occurring through cooling water or the like. <P>SOLUTION: Communicating passage forming members 61, 62 made of a resin are mounted on a one-end side of a cabinet 21 of a treatment head 1. Upper end portions of the communicating passage forming members 61, 62 are allowed to project from a gas introduction unit 10 of the treatment head 1, and are provided with temperature adjusting pipe joints 51-54 to connect temperature adjusting pipes 41-43 thereto. Communicating passages 61a-62b are formed inside the communicating passage forming members 61, 62, so that the temperature adjusting pipe joints 51-54 communicate with temperature adjusting passages 31x, 32x in electrodes 31, 32. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
