| 摘要 |
PROBLEM TO BE SOLVED: To reduce the size and cost of an inspection device itself, by preventing device run-out and vibration influence from appearing in a pickup image, even if the inspection device is moved at a high speed, by deepening the focal depth, by neglecting distortion of the pickup image when inspecting soldering of a surface mounting base board. SOLUTION: A first mirror 4 is arranged at a tilt angle of 45°to the optical axis of a video camera 3 under the video camera 3 having a long focus lens. A second mirror 5 is arranged in a mode opposed to the first mirror 4 at a predetermined interval from the first mirror 4. A third mirror 6 is arranged in a mode opposed to the second mirror 5 upward at a predetermined interval from the second mirror 5. A fourth mirror 7 is arranged at a distance corresponding to substantially 1/2 of an interval between the first mirror 6 and the second mirror 7 in a mode opposed to the third mirror 6 and opposed to an inspection object W. Thus, an objective distance on an outward appearance between this appearance inspection device 1 and the inspection object W is shortened. COPYRIGHT: (C)2006,JPO&NCIPI
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