GROUP III NITRIDE POLYCRYSTAL, METHOD FOR PRODUCING THE SAME, GROUP III NITRIDE SINGLE CRYSTAL, AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a group III nitride polycrystal in which the concentration of oxygen atoms is low; a group III nitride single crystal; and methods for producing them. SOLUTION: The method for producing the group III nitride polycrystal comprises synthesizing the group III nitride polycrystal 1 in which the concentration of oxygen atoms is≤100 ppm by reacting a halide of a group III element and NH3. The method for producing the group III nitride single crystal comprises growing the group III nitride single crystal by a sublimation method using the group III nitride polycrystal as a raw material. The group III nitride polycrystal and the group III nitride single crystal obtained by respective methods are also provided. COPYRIGHT: (C)2006,JPO&NCIPI