摘要 |
A semiconductor device comprising: a first-conductivity-type base layer; a second-conductivity-type emitter layer formed on a first main surface of said first-conductivity-type base layer; a collector electrode formed in contact with a surface of said second-conductivity-type emitter layer; a second-conductivity-type base layer formed on a second main surface of said first-conductivity-type base layer; a plurality of trenches which extend through said second-conductivity-type base layer to reach a predetermined depth of said first-conductivity-type base layer, and has a longitudinal direction in one direction; a gate electrode formed in said trench via a gate insulating film; a first-conductivity-type emitter layer selectively formed in contact with side walls of said trench, in a surface portion of said second-conductivity-type base layer; an emitter electrode formed in contact with a surface of said second-conductivity-type base layer and a surface of said first-conductivity-type emitter layer; and a second-conductivity-type semiconductor layer selectively formed in a region along the longitudinal direction of said trench, near the surface of said first-conductivity-type emitter layer.
|