| 发明名称 |
Linear motor, moving stage system, exposure apparatus, and device manufacturing method |
| 摘要 |
A linear motor includes a coil and a plurality of magnets disposed along a central axis of the coil. The magnetization directions of the plurality of magnets have different tilts with respect to the central axis.
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| 申请公布号 |
US2006082225(A1) |
申请公布日期 |
2006.04.20 |
| 申请号 |
US20050290498 |
申请日期 |
2005.12.01 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KORENAGA NOBUSHIGE;ASANO TOSHIYA |
| 分类号 |
H01L21/027;H02K41/00;G03F7/20;H01J37/20;H02K41/03;H02K41/035 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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