Thermopile element has membrane on semiconductor in a heat sink and heat sensitive element to measure cold and warm air passages

摘要

A thermopile element comprises a substrate (1) with a membrane (4) surrounded by a heat sink (7) and a thermal column (13) through which many warm (5) and cold (6) passages are formed onto the membrane. A heat-sensing element (10) is in a recess (9) by the heat sink at the cold passages : An independent claim is also included for an infrared sensor as above.