| 摘要 |
FIELD: gas analysis, in particular, detecting devices used for registration and measurement of content of micro-admixtures of nitrogen and other gases. ^ SUBSTANCE: in the sensor, containing semiconductor base and substrate, semiconductor base is made of polycrystalline film of cadmium telluride, alloyed with indium antimonide, and as substrate, electrode platform of piezo-quartz resonator is utilized. ^ EFFECT: increased sensitivity and manufacturability of sensor manufacture, expanded functional capabilities of sensor. ^ 3 dwg |
