| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture an optical element in which slippage is not generated in positional relationship when forming a plurality of different optical films on a substrate. <P>SOLUTION: First, a pattern of circular optical multilayer film 10 and optical multilayer film marks for alignment AM is transferred on a base material for substrate BM using a first mask member M1. Then, when forming ring-shaped optical multilayer films 20 on the base material for substrate BM, a patterning is performed using a second mask member M2, but, at this time it is possible to make the positional relationship among the circular optical multilayer films 10 and the ring-shaped optical multilayer films 20 to be highly accurate by performing alignment with high accuracy while seeing the the optical multilayer film marks for alignment AM formed on the base material for substrate BM through patterns TP for mark perception. Moreover, when a metallic film 80 for exfoliation is exfoliated, the shape of the optical multilayer film marks for alignment AMs can be made always clear. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
