SCANNING ELECTRON MICROSCOPE FOR ANALYSIS

摘要

PROBLEM TO BE SOLVED: To provide a scanning electron microscope for analysis having an analyzing function accurately performing element analysis and element mapping at a specific area of a sample at a correct analysis position (consonance of electron beam) with a simple constitution without providing an equivalent circuit on a scanning electron microscope side and an external analyzer side. SOLUTION: Figure 8 shows wave forms of respective signals at the time of stopping irradiation of electron beam depending on a scanning wait signal during a non-linear responding period wherein, the electron beam is moving toward the analysis position of the sample. (j) shows the wait signal. Analysis data at a correct position of the electron beam is obtained by appropriately setting the period for non-linear response generated when the electron beam moves. COPYRIGHT: (C)2006,JPO&NCIPI