| 摘要 |
A position control equipment has a piezoelectric actuator, a power supply for applying voltage to the piezoelectric actuator, a position control unit, and a reverse low voltage control unit. The position control unit identifies a position control state where position control is performed by displacing the piezoelectric actuator and a standby state that does not require the position control, and controls the position. When the position control unit identifies the standby state, the reverse low voltage control unit sets a reverse low voltage that directs oppositely to the polarization direction of the piezoelectric film and is lower than a coercive voltage and a set time during which the reverse low voltage is applied, and transmits a power supply control signal for generating the set reverse low voltage and set time to the power supply. Thus, a large displacement amount is kept and the long lifetime can be realized.
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