DEVICE AND METHOD FOR SCANNING PROBE MICROSCOPY

摘要

The invention relates to a device for scanning probe microscopy, said device comprising a scanning microscopy measuring device provided with a measuring probe for scanning microscopy measurements and a sample carrier for receiving a sample to be measured by scanning microscopy; a control device which is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically control the measuring device in order to perform a scanning microscopy measurement according to pre-defined control parameters; and/or an evaluation device that is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically evaluate measurements according to pre-defined evaluation parameters.