| 摘要 |
PROBLEM TO BE SOLVED: To provide a static capacitance sensor at a low cost with enhanced sensing sensitivity. SOLUTION: A silicon microphone element 20 includes a silicon support substrate 21, a silicon oxide layer 22 formed on the silicon support substrate 21, a moving electrode plate 23 formed on the silicon oxide layer 22, a back plate 25 supported by a support provided on the silicon support substrate 21, a first electrode 26 provided to the moving electrode plate 23, and a second electrode 27 provided to the back plate 25. The moving electrode plate 23 includes a diaphragm 23a arranged opposite to the back plate 25 via a sacrificing layer 24 and vibrated in response to the strength of a sound wave. The support includes the silicon oxide layer 22, a polishing stopper 36, and the sacrificing layer 24. COPYRIGHT: (C)2006,JPO&NCIPI
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