| 摘要 |
PROBLEM TO BE SOLVED: To smoothly switch between each of objective lenses and an SPM unit by a simple configuration without affecting the SPM unit. SOLUTION: According to information about revolver holes 1 to 5 and mounted positions of the objective lenses 5-1, 5-2, 5-3, 5-5, and SPM unit 5-4 mounted on the corresponding revolver holes 1 to 5, the rotation of the revolver 4 is controlled in the direction of rotation where the SPM unit 5-4 does not come into contact with a housing 1. COPYRIGHT: (C)2006,JPO&NCIPI
|
