ANALYZING METHOD ACCOMPANIED BY INCIDENCE OF BEAM

摘要

PROBLEM TO BE SOLVED: To ensure an analysis with high precision even in the case of a sample having a region low in flatness on an analyzing surface in an analyzing method accompanied by the incidence of a beam such as an X-ray reflectivity method or the like. SOLUTION: The most flat region of the analyzing surface of the sample 3 is selected to adjust the position of the sample 3 so that the beam enters the selected region at a predetermined angle. In the case of Fig., the beam is allowed to enter a region E but not a region D. COPYRIGHT: (C)2006,JPO&NCIPI