发明名称 Method for producing multilayers on a substrate
摘要 The invention relates to a method for producing a multilayer on a receiving substrate, including the following steps: the formation of an initial substrate comprising a first material layer formed on the surface of a supporting substrate made of a second material, molecular adhesion bonding of the surface of the initial substrate comprising the first material layer to the bonding surface of a receiving substrate to obtain a bonded structure, partial removal of the initial substrate so as to leave a thin film of said second material on the first material layer, evaporation of the second material thin film with a selective stop on the first material layer, growth of at least one layer from the first material layer bonded to the receiving substrate, with the evaporation step and the growth step being carried out in the same technological apparatus.
申请公布号 US2006083280(A1) 申请公布日期 2006.04.20
申请号 US20050247268 申请日期 2005.10.12
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 TAUZIN AURELIE;GILET PHILIPPE
分类号 H01S5/00 主分类号 H01S5/00
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