SUPERHEATED STEAM TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To improve processing efficiency by reducing heat loss of superheated steam and to keep a high-temperature state of the superheated steam.

SOLUTION: This superheated steam treatment device comprises a treatment furnace 10 and a cooler and boiler 70. The treatment furnace 10 comprises a steam generation part 20, a superheated steam generation part 28 and a treatment chamber 50 which are constituted in an integrated manner. The outside of the treatment chamber 50 is covered with a superheated steam supply chamber 52 for supplying superheated steam. Further, the whole body of the treatment furnace 10 is covered with a heat-insulating chamber 64. The superheated steam supplied from the superheated steam generation part 28 to the superheated steam supply chamber 52 is ejected into the treatment chamber 50 through ejection ports provided substantially over the whole wall surface of the treatment chamber 50. The high-temperature superheated steam which was used for treatment of a treatment object 56 is sent to the heat-insulating chamber 64, and used for suppression of temperature reduction of superheated steam in the treatment chamber 50 and the superheated steam supply chamber 52 and for heating in the steam generation part 20 and the superheated steam generation part 28.

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