发明名称 SUPPORT STRUCTURE FOR OSCILLATOR, AND INSTRUMENT FOR MEASURING PHYSICAL QUANTITY
摘要 <P>PROBLEM TO BE SOLVED: To provide support structure capable of reducing the zero-point temperature drift of a detection signal, in an instrument for measuring physical quantities that uses an oscillator. <P>SOLUTION: This supporting structure for the oscillator is provided with a substrate 12, and bonding wires 14A, 14B attached to the substrate 12 and jointed to the oscillator 1. The substrate 12 is provided with a pair of facing fixed parts 12a, and a pair of facing nonfixed parts 12b, and a through hole 13A is formed of the fixed parts 12a and the nonfixed parts 12b. The oscillator 1 is supported with the bonding wires, under the condition where the oscillator 1 does not contact with the substrate 12. The bonding wires 14A, 14B are attached to the fixed parts 12a and are not attached to the nonfixed parts 12b. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006105963(A) 申请公布日期 2006.04.20
申请号 JP20050207260 申请日期 2005.07.15
申请人 NGK INSULATORS LTD;SEIKO EPSON CORP 发明人 HAYASHI SHIGEKI;KIKUCHI TAKAYUKI;KINOSHITA YUSUKE
分类号 G01C19/56;G01P9/04;H01L41/08;H01L41/18 主分类号 G01C19/56
代理机构 代理人
主权项
地址