| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device easily adjusting an optical axis even if the state of a charged particle beam changes, and to provide an adjustment method for the charged particle beam device. SOLUTION: This invention is provided with a calculating means calculating the amount of the deflection of an alignment deflector performing axial adjustment to an objective lens etc. The calculating means is provided with a selecting means storing and selecting a plurality of calculation methods for calculating the amount of the deflection. COPYRIGHT: (C)2006,JPO&NCIPI
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