| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater plate that is prevented from deformation caused by a thermal stress while having a good heat conductivity together with a high durability, and its fabricating method. SOLUTION: The heater plate 1 having a sheath heater 3 contained in an aluminum or aluminum alloy base member 2 as an inner parts has a structure forging pressure welding an aluminum or aluminum alloy member 4 on the aluminum or aluminum alloy base member 2 to hermetic shielding therebetween. The structure is excellent in cost and productivity compared to the conventional method of bonding two plates, so that the method can be used as a heater plate for a system for manufacturing various flat displays(FPDs) such as a semiconductor manufacturing system or a liquid crystal manufacturing system or the like. The heater plate 2 is also can be used as common heater plate sheets such as a PTP sheet manufacturing system or the like. COPYRIGHT: (C)2006,JPO&NCIPI
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