| 摘要 |
PROBLEM TO BE SOLVED: To prevent a crucible from being broken when an abnormal state in which a heater cannot perform heating by the power failure, an emergency stop, or the like, is caused while melting a vapor-deposited material in the crucible of an evaporation source. SOLUTION: The evaporation source comprises a heating device 13 to heat a crucible 12, and a cooling device 15 to cool the periphery of the heating device 13. The crucible 12 is supported by the tip of an arm 21 of a movable member 20. The movable member 20 is moved to a heating position at which the crucible 12 is heated by the heating device 13 and a retracting position separated from the heating device 13 by an air cylinder 18 of a working mechanism 16. When the heater 14 is in a non-operated state while the heating device 13 is operated, the crucible 12 is moved to the retracting position together with the movable member 20, and the crucible 12 is naturally cooled in vacuum. COPYRIGHT: (C)2006,JPO&NCIPI
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