摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration gyro excellent in heat resistance, capable of reducing sensitivity deterioration while simplifying constitution, suitable for size reduction, and excellent in mass productivity. <P>SOLUTION: This piezoelectric vibration gyro uses an H-type vibrator formed integrally with arms 2a, 2b, 3a, 3b arranged in parallel and a base 1 connected to the arms 2a, 2b, 3a, 3b, driving electrodes 5, 6 are provided in the the arms 2a, 2b, and detection electrodes are provided in the arms 3a, 3b, so as to excite and detect tuning fork vibration of the arms 2a, 2b, and out-of-plane vibration orthogonal to tuning fork vibration of the arms 2a, 2b, 3a, 3b, by a piezoelectric effect due to an electric field in parallel to a main face of the H-type vibrator and along a direction perpendicular to a longitudinal direction of the arms 2a, 2b, 3a, 3b. <P>COPYRIGHT: (C)2006,JPO&NCIPI |