发明名称 PIEZOELECTRIC VIBRATION GYRO
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration gyro excellent in heat resistance, capable of reducing sensitivity deterioration while simplifying constitution, suitable for size reduction, and excellent in mass productivity. <P>SOLUTION: This piezoelectric vibration gyro uses an H-type vibrator formed integrally with arms 2a, 2b, 3a, 3b arranged in parallel and a base 1 connected to the arms 2a, 2b, 3a, 3b, driving electrodes 5, 6 are provided in the the arms 2a, 2b, and detection electrodes are provided in the arms 3a, 3b, so as to excite and detect tuning fork vibration of the arms 2a, 2b, and out-of-plane vibration orthogonal to tuning fork vibration of the arms 2a, 2b, 3a, 3b, by a piezoelectric effect due to an electric field in parallel to a main face of the H-type vibrator and along a direction perpendicular to a longitudinal direction of the arms 2a, 2b, 3a, 3b. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006105710(A) 申请公布日期 2006.04.20
申请号 JP20040291037 申请日期 2004.10.04
申请人 NEC TOKIN CORP 发明人 CHIBA MITSUHARU;SHUDA KOICHI;OSHIMA AKIKO;MIZUNO TAKESHI
分类号 G01C19/56;G01P9/04;H01L41/08;H01L41/18 主分类号 G01C19/56
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