发明名称 IMAGE DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an image display device (field emission display) capable of preventing disconnection of an upper electrode by decrease of a taper angle of an interlayer insulation layer, of realizing reduction of capacitance by increasing the thickness of the interlayer insulation layer and of preventing contamination of an electron source by sodium deposited from glass of a substrate. SOLUTION: The interlayer insulation layer is formed as a stacked film of a silicon oxide film 15-1 formed on the glass substrate side (field insulation layer 14 side) and a silicon nitride film 15-2 formed on top thereof to reduce its taper angle; disconnection of the upper electrode of the electron source formed on top thereof is prevented; the capacitance of the crossover part of the electron source on a lower electrode is reduced; and sodium deposited from the glass of the substrate is blocked. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006107746(A) 申请公布日期 2006.04.20
申请号 JP20040288489 申请日期 2004.09.30
申请人 HITACHI LTD 发明人 KUSUNOKI TOSHIAKI;SAGAWA MASAKAZU;TSUJI KAZUTAKA
分类号 H01J31/12;H01J29/04 主分类号 H01J31/12
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