发明名称 |
Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus |
摘要 |
A system and method for processing an edge of a substrate includes an edge roller and a first proximity head. The first proximity head being mounted on the edge roller. The first proximity head capable of forming a meniscus and including a concave portion and multiple ports opening into the concave portion. The concave portion being capable of receiving an edge of a substrate and the ports including at least one process liquid injection port, at least one vacuum port and at least one surface tension control port.
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申请公布号 |
US2006081270(A1) |
申请公布日期 |
2006.04.20 |
申请号 |
US20050292490 |
申请日期 |
2005.12.01 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
WOODS CARL A.;GARCIA JAMES P.;DE LARIOS JOHN M. |
分类号 |
C23G1/00;H01L25/00;B08B1/02;B08B3/00;B08B3/04;H01L21/00 |
主分类号 |
C23G1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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